Hefei Research Institute silicon micro-nano array structure preparation and functionalization research series progress

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The research team at the Hefei Institute of Materials Science, Chinese Academy of Sciences, has made significant progress in the development of silicon micro-nano array structures. Their work includes the preparation of high-area-density silicon nanowire arrays, their exfoliation, and non-damaging transfer to various substrates. Based on these materials, they have developed solar cells with outstanding photoelectric conversion efficiency and excellent stability. Silicon, as a core material in modern electronics, plays a crucial role in fields such as microelectronics, photovoltaics, thermoelectrics, and energy storage. Silicon micro-nanostructures have long been a focus of scientific research. The areal density of silicon nanoarrays is a critical parameter for applications like information storage. Traditionally, the surface density achieved is below 10⁹/cm², but increasing it further remains a major challenge. Additionally, monocrystalline silicon is hard and lacks flexibility, limiting its use in flexible or portable electronic devices. The stability of functional devices based on these structures is also an important issue. Recent breakthroughs by the research group led by Dr. Ye Changhui have addressed these challenges. Dr. Teng Dayong improved the traditional polystyrene microsphere stencil technique using iron oxide-assisted template technology. This allowed for the creation of single- and double-layer polystyrene microsphere arrays, resulting in silicon micro-nano arrays with twice the surface density of conventional arrays, reaching over 10⁹/cm² (Figure 1). Further improvements were achieved by using smaller polystyrene spheres to increase the density even more. Meanwhile, Ph.D. student Wu Wei introduced an ammonia-assisted selective etching method to completely remove silicon nanowire arrays from the silicon wafer (Figure 2), enabling them to be transferred to any receiving substrate. In particular, transferring the arrays to flexible substrates like PET significantly enhanced their flexibility. These ultra-thin (10 microns) flexible silicon nanowire arrays exhibited visible light absorption of over 90% (Figure 3). The findings were published in *Langmuir* and *Scientific Reports*. Dr. He Weiwei, another Ph.D. student, developed hybrid solar cells combining silicon micro-nano arrays with organic conductors. They introduced a new interface processing technique that reduced defect density at the heterojunction, greatly improving device stability. Conventional hybrid solar cells typically lose over 90% of their efficiency within 24 hours without encapsulation. However, the solar cells developed by the Hefei team retained 50% of their original efficiency after five months under the same conditions (Figure 4). These results were also published in *Scientific Reports*. This research was supported by several key programs, including the National Major Scientific Research Program, the National Natural Science Foundation of China, and the 100-Talent Program of the Chinese Academy of Sciences.

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